KLA Corporation
PLASMONIC PHOTOCATHODE EMITTERS AT ULTRAVIOLET AND VISIBLE WAVELENGTHS
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Abstract:
A photocathode emitter can include a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure can serve as a spot-confining structure and an electrical underlayer for biasing the photocathode. The plasmonic structure can confine the incident light at subwavelength sizes.
Status:
Application
Type:
Utility
Filling date:
13 Feb 2020
Issue date:
20 Aug 2020