Lam Research Corporation
LAMINATED AEROSOL DEPOSITION COATING FOR ALUMINUM COMPONENTS FOR PLASMA PROCESSING CHAMBERS

Abstract:

An apparatus adapted for use in a plasma processing chamber is provided. An aluminum body with at least one surface is provided. An aluminum oxide containing aerosol deposition coating is disposed over the at least one surface of the aluminum body. An yttrium containing aerosol deposition coating is disposed over the aluminum oxide containing aerosol deposition coating.