Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Grant | Utility: Deposition of self assembled monolayer for enabling selective deposition and etch Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Alternative integration for redistribution layer process Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: PECVD deposition system for deposition on selective side of the substrate Filling date: 6 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Planar substrate edge contact with open volume equalization pathways and side containment Filling date: 6 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Frequency tuning for a matchless plasma source Filling date: 6 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Utility: Substrate processing system with tandem source activation for CVD Filling date: 6 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Design: Semiconductor wafer processing apparatus Filling date: 6 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Utility: Manifold valve for multiple precursors Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Two-stage pin lifter for de-chuck operations Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Software emulator for hardware components in a gas delivery system of substrate processing system Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Metal liner passivation and adhesion enhancement by zinc doping Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Application | Utility: CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Grant | Utility: Distance measurement between gas distribution device and substrate support at high temperatures Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Application | Utility: PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICONDUCTOR SUBSTRATE PROCESSING Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: AUTOMATED TRANSFER OF EDGE RING REQUIRING ROTATIONAL ALIGNMENT Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Grant | Utility: Controlling plating electrolyte concentration on an electrochemical plating apparatus Filling date: 6 Sep 2025 Issue date: 2 Aug 2022 |
Grant | Utility: Selective deposition using hydrolysis Filling date: 6 Sep 2025 Issue date: 2 Aug 2022 |
Application | Utility: DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLASMA EXPOSURE FOR GAPFILL Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLASMA EXPOSURE FOR GAPFILL Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: THERMOELECTRIC COOLING PEDESTAL FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SELECTIVE CARBON DEPOSITION Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: REDUCED DIAMETER CARRIER RING HARDWARE FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: IN-SITU CONTROL OF FILM PROPERTIES DURING ATOMIC LAYER DEPOSITION Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: RF IMMUNE SENSOR PROBE FOR MONITORING A TEMPERATURE OF AN ELECTROSTATIC CHUCK OF A SUBSTRATE PROCESSING SYSTEM Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SYSTEMS AND METHODS FOR COMPENSATING FOR RF POWER LOSS Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SixNy AS A NUCLEATION LAYER FOR SiCxOy Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SHOWERHEAD INSERT FOR UNIFORMITY TUNING Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Grant | Utility: Etching isolation features and dense features within a substrate Filling date: 6 Sep 2025 Issue date: 26 Jul 2022 |
Application | Utility: ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES Filling date: 6 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: VARIABLE INDUCTOR DEVICE Filling date: 6 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: VOLTAGE AND CURRENT PROBE Filling date: 6 Sep 2025 Issue date: 21 Jul 2022 |
Grant | Utility: Wafer transport assembly with integrated buffers Filling date: 6 Sep 2025 Issue date: 19 Jul 2022 |
Grant | Utility: Systems and methods for controlling plasma instability in semiconductor fabrication Filling date: 6 Sep 2025 Issue date: 19 Jul 2022 |
Application | Utility: LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM Filling date: 6 Sep 2025 Issue date: 14 Jul 2022 |
Application | Utility: RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEMPERATURE TRANSIENTS OF MULTI-ZONE SUBSTRATE SUPPORTS Filling date: 6 Sep 2025 Issue date: 14 Jul 2022 |
Application | Utility: HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIGHT-UP/ARCING Filling date: 6 Sep 2025 Issue date: 14 Jul 2022 |
Grant | Utility: Pad raising mechanism in wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Method for conditioning a ceramic coating Filling date: 6 Sep 2025 Issue date: 12 Jul 2022 |
Application | Utility: HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON HARDMASKS BY HIGH POWER PULSED LOW FREQUENCY RF Filling date: 6 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: ATOMIC LAYER ETCH AND SELECTIVE DEPOSITION PROCESS FOR EXTREME ULTRAVIOLET LITHOGRAPHY RESIST IMPROVEMENT Filling date: 6 Sep 2025 Issue date: 7 Jul 2022 |
Grant | Utility: Thermal atomic layer etch with rapid temperature cycling Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Design: Cooling plate for a semiconductor processing apparatus Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 |
Application | Utility: ALTERNATING ETCH AND PASSIVATION PROCESS Filling date: 6 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRATE SUPPORT FOR MULTI-PATTERNING PROCESSES Filling date: 6 Sep 2025 Issue date: 30 Jun 2022 |
Grant | Utility: Surface modified depth controlled deposition for plasma based deposition Filling date: 6 Sep 2025 Issue date: 28 Jun 2022 |
Showing 1 to 50 of 883 patents.