Lam Research Corporation
SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS

Abstract:

A deposition tool including a processing chamber, a deposition pedestal for supporting a substrate in the processing chamber and for depositing a layer of material on a first surface of the substrate and a showerhead assembly having a faceplate opposing a second surface of the substrate, the faceplate of the showerhead having a plurality of configurable gas outlets arranged to distribute a purge gas adjacent the second surface of the substrate when the layer of material is being deposited on the first surface of the substrate by the deposition pedestal.