Lam Research Corporation
APPARATUS WITH OPTICAL CAVITY FOR DETERMINING PROCESS RATE

Abstract:

A parameter measurement system is provided. A cavity ring down device is provided comprising a first cavity ring down mirror and a second cavity ring down mirror spaced apart from the first cavity ring down mirror. At least one laser light source is optically coupled to the first cavity ring down mirror. A light detector is optically coupled to either the first cavity ring down mirror or the second cavity ring down mirror. A controller is configured to use a sample received from the processing chamber and the light from the at least one laser light source and reflected between the first and second cavity ring down mirrors to measure one or more process parameters and adjust the process based on the one or more process parameters.