Lam Research Corporation
CONFINEMENT RING WITH EXTENDED LIFE

Abstract:

A confinement ring for a substrate processing system includes a lower wall, an outer wall, and an upper wall defining a plasma region within the confinement ring. A first plurality of slots is formed within the lower wall. The first plurality of slots provides fluid communication between the plasma region within the confinement ring and an environment external to the confinement ring. A recess is defined in a lower surface of the lower wall. A lower ring is arranged within the recess of the lower surface. The lower ring includes a second plurality of slots that provides fluid communication between the plasma region within the confinement ring and an environment external to the confinement ring via the first plurality of slots.