Lam Research Corporation
SUBSTRATE PROCESSING CHAMBER WITH SHOWERHEAD HAVING COOLED FACEPLATE

Abstract:

A showerhead for a substrate processing chamber includes: inner walls; an inner plenum between the inner walls; a faceplate having a first surface and a second surface that is opposite the first surface; holes through the faceplate that extend from the first surface to the second surface; a first inlet that is fluidly connected to the inner plenum; outer walls; a first outer plenum between the inner walls and the outer walls; a second outer plenum between the inner walls and the outer walls; and coolant channels that: fluidly connect the first outer plenum with the second outer plenum; are located within the faceplate between the first and second surfaces; and are fluidly isolated from the holes. The showerhead also includes a second inlet that is fluidly connected to the first outer plenum.