Lam Research Corporation
Edge exclusion control with adjustable plasma exclusion zone ring

Abstract:

A system for controlling a size of an edge exclusion region is described. The system includes an upper electrode, an upper plasma exclusion zone (PEZ) ring located beside the upper electrode, an upper electrode extension located beside the upper PEZ ring, and a system controller configured to generate signals regarding a first position and a second position of the upper PEZ ring. The system further includes an actuator and a position controller coupled to the system controller and the actuator. The position controller is configured to receive the signals from the system controller, and to control the actuator based on the signals to achieve the first position and the second position The first and second positions are achieved independent of any movement of the upper electrode.