Lam Research Corporation
Surface coating treatment
Last updated:
Abstract:
A method for conditioning a ceramic layer with a thickness of less than 150 .mu.m over a substrate is provided. The ceramic layer is cleaned. A region of the ceramic layer is scanned with a pulsed excimer laser beam at a repetition rate of 3-300 Hz.
Status:
Grant
Type:
Utility
Filling date:
7 Dec 2015
Issue date:
24 Sep 2019