Lam Research Corporation
Universal multiprotocol industrial data logger

Abstract:

A data capture module includes a first port configured to receive first data transmitted from a first component to a second component of a substrate processing system, a second port configured to received second data transmitted from the second component to the first component, a first data stream forwarding module configured to duplicate the first data, forward the duplicated first data to the second port, and output the first data, and a second data stream forwarding module configured to duplicate the second data, forward the duplicated second data to the first port, and output the second data. The first port is configured to transmit the duplicated second data to the first component and the second port is configured to transmit the duplicated first data to the second component. A data compression module is configured to compress the first and second data. Data storage is configured to store the compressed data.