Nova Ltd.
Scatterometry system and method

Abstract:

A method and system are presented for use in scatterometry analysis for a patterned structure. According to this technique, a model of a patterned structure is provided comprising a selected number of virtual segment data pieces indicative of a respective number of segments of the patterned structure along Z-axis through the structure. Each of the segment data pieces is processed for determining a matrix [.OMEGA..sub.n] comprising Z-axis derivatives of electromagnetic fields' response of the segment to incident field based on Maxwell's equations' solution, and transforming this matrix [.OMEGA..sub.n] into an approximated response matrix [ .sub.n] corresponding to the electromagnetic field interaction between two different points spaced along the Z-axis. The transformation is preferably carried out by a GPU, and comprises embedding said matrix [.OMEGA..sub.n] in a series expansion of said matrix exponential term [ .sub.n]. Then, the approximated response matrices {[ .sub.n]} for all the segment data pieces are multiplied for determining a general propagation matrix [ ], which is utilized to determine a scattering matrix for the patterned structure. The multiplication may also be performed by GPU.