Nova Ltd.
Patents, Design & Utilities

Last updated:

List of all Nova Ltd. patents 46 in total

Status Patent
Application
Utility: INTEGRATED MEASUREMENT SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 23 Dec 2021
Application
Utility: OPTICAL PHASE MEASUREMENT METHOD AND SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 25 Nov 2021
Application
Utility: SCATTEROMETRY SYSTEM AND METHOD External link
Filling date: 5 Sep 2025 Issue date: 23 Sep 2021
Application
Utility: OPTICAL TECHNIQUE FOR MATERIAL CHARACTERIZATION External link
Filling date: 5 Sep 2025 Issue date: 23 Sep 2021
Grant
Utility: X-ray based measurements in patterned structure External link
Filling date: 5 Sep 2025 Issue date: 24 Aug 2021
Grant
Utility: Metrology and process control for semiconductor manufacturing External link
Filling date: 5 Sep 2025 Issue date: 17 Aug 2021
Application
Utility: TIME-DOMAIN OPTICAL METROLOGY AND INSPECTION OF SEMICONDUCTOR DEVICES External link
Filling date: 5 Sep 2025 Issue date: 12 Aug 2021
Application
Utility: ACCURATE RAMAN SPECTROSCOPY External link
Filling date: 5 Sep 2025 Issue date: 22 Jul 2021
Application
Utility: TEM-BASED METROLOGY METHOD AND SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 15 Jul 2021
Grant
Utility: Optical phase measurement method and system External link
Filling date: 5 Sep 2025 Issue date: 8 Jun 2021
Application
Utility: SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATTEROMETRY External link
Filling date: 5 Sep 2025 Issue date: 3 Jun 2021
Application
Utility: RAMAN SPECTROSCOPY BASED MEASUREMENT SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 3 Jun 2021
Application
Utility: METROLOGY AND PROCESS CONTROL FOR SEMICONDUCTOR MANUFACTURING External link
Filling date: 5 Sep 2025 Issue date: 20 May 2021
Application
Utility: METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES External link
Filling date: 5 Sep 2025 Issue date: 22 Apr 2021
Grant
Utility: Method and system for processing patterned structures External link
Filling date: 5 Sep 2025 Issue date: 13 Apr 2021
Grant
Utility: Scatterometry system and method External link
Filling date: 5 Sep 2025 Issue date: 6 Apr 2021
Application
Utility: METHOD AND SYSTEM FOR OPTIMIZING OPTICAL INSPECTION OF PATTERNED STRUCTURES External link
Filling date: 5 Sep 2025 Issue date: 25 Mar 2021
Grant
Utility: TEM-based metrology method and system External link
Filling date: 5 Sep 2025 Issue date: 9 Feb 2021
Application
Utility: HYBRID METROLOGY METHOD AND SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 7 Jan 2021
Application
Utility: PROCESS CONTROL OF SEMICONDUCTOR FABRICATION BASED ON SPECTRA QUALITY METRICS External link
Filling date: 5 Sep 2025 Issue date: 31 Dec 2020
Grant
Utility: Method and system for optical characterization of patterned samples External link
Filling date: 5 Sep 2025 Issue date: 29 Dec 2020
Application
Utility: OPTICAL PHASE MEASUREMENT SYSTEM AND METHOD External link
Filling date: 5 Sep 2025 Issue date: 12 Nov 2020
Application
Utility: METROLOGY METHOD AND SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 17 Sep 2020
Application
Utility: PROCESS CONTROL OF SEMICONDUCTOR FABRICATION BASED ON LINKAGE BETWEEN DIFFERENT FABRICATION STEPS External link
Filling date: 5 Sep 2025 Issue date: 3 Sep 2020
Grant
Utility: Method and system for optical metrology in patterned structures External link
Filling date: 5 Sep 2025 Issue date: 1 Sep 2020
Application
Utility: RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES External link
Filling date: 5 Sep 2025 Issue date: 13 Aug 2020
Grant
Utility: Optical system and method for measurements of samples External link
Filling date: 5 Sep 2025 Issue date: 11 Aug 2020
Grant
Utility: Hybrid metrology method and system External link
Filling date: 5 Sep 2025 Issue date: 4 Aug 2020
Application
Utility: MEASURING COMPLEX STRUCTURES IN SEMICONDUCTOR FABRICATION External link
Filling date: 5 Sep 2025 Issue date: 18 Jun 2020
Application
Utility: LAYER DETECTION FOR HIGH ASPECT RATIO ETCH CONTROL External link
Filling date: 5 Sep 2025 Issue date: 18 Jun 2020
Grant
Utility: Optical phase measurement system and method External link
Filling date: 5 Sep 2025 Issue date: 26 May 2020
Grant
Utility: Measuring complex structures in semiconductor fabrication External link
Filling date: 5 Sep 2025 Issue date: 26 May 2020
Application
Utility: METHOD AND SYSTEM FOR OPTIMIZING OPTICAL INSPECTION OF PATTERNED STRUCTURES External link
Filling date: 5 Sep 2025 Issue date: 20 Feb 2020
Application
Utility: TEST STRUCTURE DESIGN FOR METROLOGY MEASUREMENTS IN PATTERNED SAMPLES External link
Filling date: 5 Sep 2025 Issue date: 20 Feb 2020
Grant
Utility: Raman spectroscopy based measurements in patterned structures External link
Filling date: 5 Sep 2025 Issue date: 18 Feb 2020
Application
Utility: OPTICAL PHASE MEASUREMENT SYSTEM AND METHOD External link
Filling date: 5 Sep 2025 Issue date: 23 Jan 2020
Application
Utility: SCATTEROMETRY SYSTEM AND METHOD External link
Filling date: 5 Sep 2025 Issue date: 16 Jan 2020
Grant
Utility: Method for use in process control of manufacture of patterned sample External link
Filling date: 5 Sep 2025 Issue date: 14 Jan 2020
Application
Utility: AN APPARATUS AND METHOD FOR ELECTRICAL TEST PREDICTION External link
Filling date: 5 Sep 2025 Issue date: 2 Jan 2020
Application
Utility: TEM-BASED METROLOGY METHOD AND SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 26 Dec 2019
Application
Utility: MONITORING SYSTEM AND METHOD FOR VERIFYING MEASUREMENTS IN PATTENED STRUCTURES External link
Filling date: 5 Sep 2025 Issue date: 7 Nov 2019
Application
Utility: OPTICAL SYSTEM AND METHOD FOR MEASURING PARAMETERS OF PATTERNED STRUCTURES IN MICRO-ELECTRONIC DEVICES External link
Filling date: 5 Sep 2025 Issue date: 7 Nov 2019
Application
Utility: METHOD AND SYSTEM FOR OPTICAL METROLOGY IN PATTERNED STRUCTURES External link
Filling date: 5 Sep 2025 Issue date: 17 Oct 2019
Grant
Utility: Scatterometry system and method External link
Filling date: 5 Sep 2025 Issue date: 6 Aug 2019
Grant
Utility: Optical critical dimension metrology External link
Filling date: 5 Sep 2025 Issue date: 30 Jul 2019
Grant
Utility: Optical phase measurement method and system External link
Filling date: 5 Sep 2025 Issue date: 30 Jul 2019

Showing 1 to 46 of 46 patents.