Apple Inc.
Optical verification system and methods of verifying micro device transfer
Last updated:
Abstract:
An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.
Status:
Grant
Type:
Utility
Filling date:
24 Sep 2019
Issue date:
31 Aug 2021