Apple Inc.
Optical verification system and methods of verifying micro device transfer

Last updated:

Abstract:

An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.

Status:
Grant
Type:

Utility

Filling date:

24 Sep 2019

Issue date:

31 Aug 2021