Apple Inc.
Multicavity pressure sensor
Last updated:
Abstract:
Aspects of the subject technology relate to an apparatus including multiple cavities disposed adjacent to one another in a housing structure. The apparatus further includes a number of membranes, with each membrane disposed over a cavity to seal the cavity, and a sensor that can sense a deflection of a respective membrane associated with one of the cavities in response to an applied pressure. Each membrane is operable within a respective pressure range, and the applied pressure is within an operating range of the respective membrane.
Status:
Grant
Type:
Utility
Filling date:
2 Mar 2020
Issue date:
15 Feb 2022