Apple Inc.
Methods for Die-to-Wafer Device Layer Transfer with Precise Control of Device Layer Vertical Position

Abstract:

Methods and structures are described to facilitate the transfer of device layer coupons with controlled vertical position. In an embodiment, a plurality of device layer coupons is bonded to a receiving substrate with an adhesive layer, where distance between front surfaces of the plurality of device layer coupons and a bulk layer of the receiving substrate is controlled by a plurality of rigid mechanical spacers.