Advanced Energy Industries, Inc.
INTER-PERIOD CONTROL FOR PASSIVE POWER DISTRIBUTION OF MULTIPLE ELECTRODE INDUCTIVE PLASMA SOURCE

Last updated:

Abstract:

A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.

Status:
Application
Type:

Utility

Filling date:

12 Feb 2021

Issue date:

3 Jun 2021