Advanced Energy Industries
Patents, Design & Utilities
Last updated:
List of all Advanced Energy Industries patents 105 in total
| Status | Patent |
|---|---|
Grant | Utility: Inter-period control system for plasma power delivery system and method of operating same Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Spatial monitoring and control of plasma processing environments Filling date: 6 Sep 2025 Issue date: 6 Sep 2022 |
Application | Utility: SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES Filling date: 6 Sep 2025 Issue date: 1 Sep 2022 |
Application | Utility: HIGH SIDE CURRENT MONITOR Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: OPTICAL GAS CONCENTRATION MEASUREMENT APPARATUS Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: POWER DELIVERY TO A PLASMA VIA INDUCTIVE COUPLING Filling date: 6 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: WAFER CHUCKING MONITOR USING HIGH FREQUENCY INJECTED AC SIGNAL Filling date: 6 Sep 2025 Issue date: 7 Jul 2022 |
Grant | Utility: System and apparatus with low power pin diode drivers Filling date: 6 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions Filling date: 6 Sep 2025 Issue date: 21 Jun 2022 |
Application | Utility: START-UP VOLTAGE OVERSHOOT REDUCTION Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: MATCH EFFICIENCY-VARIATION COMPENSATION Filling date: 6 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: SYSTEMS AND METHODS FOR MONITORING FAULTS, ANOMALIES, AND OTHER CHARACTERISTICS OF A SWITCHED MODE ION ENERGY DISTRIBUTION SYSTEM Filling date: 6 Sep 2025 Issue date: 19 May 2022 |
Application | Utility: COATED-SUBSTRATE SENSING AND CRAZING MITIGATION Filling date: 6 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: SYSTEMS AND METHODS COMBINING MATCH NETWORKS AND FREQUENCY TUNING Filling date: 6 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: FIBER OPTIC TEMPERATURE PROBE Filling date: 6 Sep 2025 Issue date: 28 Apr 2022 |
Application | Utility: MECHANICAL AND ELECTRICAL CONNECTION CLAMP Filling date: 6 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: Alternating Current (AC) Dual Magnetron Sputtering Filling date: 6 Sep 2025 Issue date: 24 Mar 2022 |
Grant | Utility: High side current monitor Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Spatial monitoring and control of plasma processing environments Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Application | Utility: CONTROL CIRCUIT FOR A POWER CONVERTER Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 |
Grant | Utility: Application of modulating supplies in a plasma processing system Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Application | Utility: UART TRANSMISSIONS WITH TWO START BITS FOR AUTOMATIC BAUD DETECTION AND REDUCED CLOCK SKEW Filling date: 6 Sep 2025 Issue date: 24 Feb 2022 |
Grant | Utility: Multiplexed power generator output with channel offsets for pulsed driving of multiple loads Filling date: 6 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Triboelectric-based cable sensors Filling date: 6 Sep 2025 Issue date: 14 Dec 2021 |
Grant | Utility: Control circuit for a power converter Filling date: 6 Sep 2025 Issue date: 30 Nov 2021 |
Grant | Utility: Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system Filling date: 6 Sep 2025 Issue date: 30 Nov 2021 |
Application | Utility: EVENT MONITORING AND CHARACTERIZATION Filling date: 6 Sep 2025 Issue date: 18 Nov 2021 |
Grant | Utility: Combination air-water cooling device Filling date: 6 Sep 2025 Issue date: 16 Nov 2021 |
Application | Utility: SURFACE CHARGE AND POWER FEEDBACK AND CONTROL USING A SWITCH MODE BIAS SYSTEM Filling date: 6 Sep 2025 Issue date: 11 Nov 2021 |
Application | Utility: PROGRAMMABLE IGNITION PROFILES FOR ENHANCED PLASMA IGNITION Filling date: 6 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: SYSTEM, METHOD, AND APPARATUS FOR ION CURRENT COMPENSATION Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: MEASUREMENT AND ADJUSTMENT OF A CHARGE OF A WORKPIECE Filling date: 6 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: INPUT IMPEDANCE NETWORKS WITH POWER RECOVERY Filling date: 6 Sep 2025 Issue date: 14 Oct 2021 |
Grant | Utility: Method and apparatus for changing the apparent source impedance of a generator Filling date: 6 Sep 2025 Issue date: 5 Oct 2021 |
Application | Utility: COMBINATION AIR-WATER COOLING DEVICE Filling date: 6 Sep 2025 Issue date: 30 Sep 2021 |
Application | Utility: Dual Reverse Pulse Sputtering System Filling date: 6 Sep 2025 Issue date: 16 Sep 2021 |
Application | Utility: INTER-PERIOD CONTROL SYSTEM FOR PLASMA POWER DELIVERY SYSTEM AND METHOD OF OPERATING THE SAME Filling date: 6 Sep 2025 Issue date: 16 Sep 2021 |
Application | Utility: HIGH ENERGY PULSE ON A HIGH-VOLTAGE-DIRECT-CURRENT OFFSET Filling date: 6 Sep 2025 Issue date: 2 Sep 2021 |
Application | Utility: INTER-PERIOD CONTROL SYSTEM FOR PLASMA POWER DELIVERY SYSTEM AND METHOD OF OPERATING SAME Filling date: 6 Sep 2025 Issue date: 12 Aug 2021 |
Application | Utility: SPATIAL MONITORING AND CONTROL OF PLASMA PROCESSING ENVIRONMENTS Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Grant | Utility: System and method to measure and adjust a charge of a workpiece Filling date: 6 Sep 2025 Issue date: 27 Jul 2021 |
Application | Utility: INTEGRATED CONTROL OF A PLASMA PROCESSING SYSTEM Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 |
Grant | Utility: Rate enhanced pulsed DC sputtering system Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 |
Application | Utility: Frequency Tuning for Modulated Plasma Systems Filling date: 6 Sep 2025 Issue date: 10 Jun 2021 |
Application | Utility: INTER-PERIOD CONTROL FOR PASSIVE POWER DISTRIBUTION OF MULTIPLE ELECTRODE INDUCTIVE PLASMA SOURCE Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: PRECISION DIGITAL TO ANALOG CONVERSION IN THE PRESENCE OF VARIABLE AND UNCERTAIN FRACTIONAL BIT CONTRIBUTIONS Filling date: 6 Sep 2025 Issue date: 20 May 2021 |
Grant | Utility: High energy pulse on a high-voltage-direct-current offset Filling date: 6 Sep 2025 Issue date: 18 May 2021 |
Grant | Utility: System, method, and apparatus for controlling ion energy distribution in plasma processing systems Filling date: 6 Sep 2025 Issue date: 18 May 2021 |
Application | Utility: SYSTEM AND APPARATUS WITH LOW POWER PIN DIODE DRIVERS Filling date: 6 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: SYNCHRONIZATION BETWEEN AN EXCITATION SOURCE AND A SUBSTRATE BIAS SUPPLY Filling date: 6 Sep 2025 Issue date: 6 May 2021 |
Showing 1 to 50 of 105 patents.