Advanced Energy Industries, Inc.
ADAPTIVE PLASMA IGNITION

Abstract:

Systems and methods for adaptive plasma ignition are disclosed. A method includes assessing each of N voltage waveforms, wherein the assessing includes: selecting, from among the N voltage waveforms, a particular voltage waveform to apply to a plasma processing chamber, applying, repeatedly, the particular voltage waveform to the plasma processing chamber, wherein each application of the particular voltage waveform results in plasma ignition, and obtaining, each time a plasma is ignited in the plasma chamber, ignition-parameter values of each voltage waveform. An ignition profile may be created and stored in an ignition datastore for the particular voltage waveform, wherein the ignition profile is based upon the ignition-parameter values.