Advanced Energy Industries, Inc.
DETECTION OF DAMAGE IN MATCHING NETWORKS

Abstract:

Systems and methods for operating a match network are disclosed. A method includes obtaining at least one measurement-based-attribute at the first side of a match network and at least one measurement-based-attribute at a second side of the match network. A present reactance setting of the match network is obtained and a model of the match network is accessed that associates the at least one measurement-based-attribute at the first side of the match network with at least one expected-attribute at the second side of the match network based upon the present reactance setting of the match network. The at least one measurement-based-attribute at the second side of the match network is contrasted with the at least one expected-output-attribute to assess whether the match network is at least one of damaged or operating outside of specifications.