Advanced Energy Industries, Inc.
PROGRAMMABLE IGNITION PROFILES FOR ENHANCED PLASMA IGNITION
Last updated:
Abstract:
Generators and methods for igniting a plasma in a plasma chamber are disclosed. The generator includes an ignition profile generator that includes a data interface configured to receive a voltage value and a time value for each of N data points and an ignition data generator configured to create an ignition profile from the N data points. The generator also includes an ignition profile datastore to store the ignition profile and a waveform generator configured to apply a waveform with the ignition profile to an output of the generator.
Status:
Application
Type:
Utility
Filling date:
29 Apr 2020
Issue date:
4 Nov 2021