Advanced Energy Industries, Inc.
SYSTEMS AND METHODS COMBINING MATCH NETWORKS AND FREQUENCY TUNING
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Abstract:
A power system for a plasma processing system and associated methods are disclosed. The power system comprises a generator with a frequency-tuning subsystem, a match network coupled between the plasma processing chamber and the generator, and means for adjusting an impedance of the match network so the frequency-tuning subsystem adjusts a frequency of power applied by the generator to a target frequency while the match network presents a desired impedance to the generator in response to variations in an impedance of a plasma in a plasma processing chamber.
Status:
Application
Type:
Utility
Filling date:
26 Oct 2021
Issue date:
5 May 2022