Applied Materials
Utility Patents
Last updated:
List of all Applied Materials patents 1,752 in total
Status | Patent |
---|---|
Grant | Utility: Lithography process window enhancement for photoresist patterning Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Oxygen vacancy of amorphous indium gallium zinc oxide passivation by silicon ion treatment Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Initiation modulation for plasma deposition Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Drying environments for reducing substrate defects Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Position and temperature monitoring of ALD platen susceptor Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Lower side wall for epitaxtail growth apparatus Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: High temperature rotation module for a processing chamber Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Angled ion implant to reduce MOSFET trench sidewall roughness Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Rare-earth oxide based coatings based on ion assisted deposition Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Surface topography measurement apparatus and method Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Enhanced etch resistance for insulator layers implanted with low energy ions Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Atomic layer etching of metals Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Ion source with tubular cathode Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Substrate transfer mechanism to reduce back-side substrate contact Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Protection interfaces for Li-ion battery anodes Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Showerhead for ALD precursor delivery Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Temperature controlled secondary electrode for ion control at substrate edge Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Methods and apparatus for controlling contact resistance in cobalt-titanium structures Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Methods and apparatus for controlling warpage in wafer level packaging processes Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Blocker plate for use in a substrate process chamber Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Drying process for high aspect ratio features Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Methods and apparatus for high reflectivity aluminum layers Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Eliminating internal reflections in an interferometric endpoint detection system Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Plasma reactor with electrode filaments extending from ceiling Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Methods of etching metal-containing layers Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Treatments to enhance material structures Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Substrate deformation detection and correction Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Pumping liner for improved flow uniformity Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Image based metrology of surface deformations Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Processing system for forming layers Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Reconstituted substrate for radio frequency applications Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Slit valve pneumatic control Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Self-measurement of semiconductor image using deep learning Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Capacitive sensor housing for chamber condition monitoring Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Multi-turn drive assembly and systems and methods of use thereof Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Edge ring for a substrate processing chamber Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Air knife inlet and exhaust for additive manufacturing Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Sensor-based position and orientation feedback of robot end effector with respect to destination chamber Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Contactless workpiece temperature sensor Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Selective material removal Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Self-aligned structures from sub-oxides Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Methods for depositing blocking layers on metal surfaces Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Electrostatic chuck with differentiated ceramics Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Deposition of tellurium-containing thin films Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Process chamber for etching low k and other dielectric films Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Deep trench integration processes and devices Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Ferroelectric-assisted tunneling selector device Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Showing 50 to 100 of 1752 patents.