Applied Materials
Utility Patents

Last updated:

List of all Applied Materials patents 1,752 in total

Status Patent
Grant
Utility: Lithography process window enhancement for photoresist patterning External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: Oxygen vacancy of amorphous indium gallium zinc oxide passivation by silicon ion treatment External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: Initiation modulation for plasma deposition External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: Drying environments for reducing substrate defects External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: Position and temperature monitoring of ALD platen susceptor External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: Lower side wall for epitaxtail growth apparatus External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: High temperature rotation module for a processing chamber External link
Filling date: 6 Sep 2025 Issue date: 30 Aug 2022
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Utility: Angled ion implant to reduce MOSFET trench sidewall roughness External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Rare-earth oxide based coatings based on ion assisted deposition External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Surface topography measurement apparatus and method External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Enhanced etch resistance for insulator layers implanted with low energy ions External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Atomic layer etching of metals External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Ion source with tubular cathode External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Substrate transfer mechanism to reduce back-side substrate contact External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Protection interfaces for Li-ion battery anodes External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Showerhead for ALD precursor delivery External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Temperature controlled secondary electrode for ion control at substrate edge External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Methods and apparatus for controlling contact resistance in cobalt-titanium structures External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Methods and apparatus for controlling warpage in wafer level packaging processes External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Blocker plate for use in a substrate process chamber External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Drying process for high aspect ratio features External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Methods and apparatus for high reflectivity aluminum layers External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Eliminating internal reflections in an interferometric endpoint detection system External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Plasma reactor with electrode filaments extending from ceiling External link
Filling date: 6 Sep 2025 Issue date: 23 Aug 2022
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Utility: Methods of etching metal-containing layers External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Treatments to enhance material structures External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Substrate deformation detection and correction External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Pumping liner for improved flow uniformity External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Image based metrology of surface deformations External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Processing system for forming layers External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Reconstituted substrate for radio frequency applications External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Slit valve pneumatic control External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Self-measurement of semiconductor image using deep learning External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Capacitive sensor housing for chamber condition monitoring External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Multi-turn drive assembly and systems and methods of use thereof External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Edge ring for a substrate processing chamber External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Air knife inlet and exhaust for additive manufacturing External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Sensor-based position and orientation feedback of robot end effector with respect to destination chamber External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Contactless workpiece temperature sensor External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Selective material removal External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Self-aligned structures from sub-oxides External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Methods for depositing blocking layers on metal surfaces External link
Filling date: 6 Sep 2025 Issue date: 16 Aug 2022
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Utility: Electrostatic chuck with differentiated ceramics External link
Filling date: 6 Sep 2025 Issue date: 9 Aug 2022
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Utility: Deposition of tellurium-containing thin films External link
Filling date: 6 Sep 2025 Issue date: 9 Aug 2022
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Utility: Process chamber for etching low k and other dielectric films External link
Filling date: 6 Sep 2025 Issue date: 9 Aug 2022
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Utility: Deep trench integration processes and devices External link
Filling date: 6 Sep 2025 Issue date: 9 Aug 2022
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Utility: Ferroelectric-assisted tunneling selector device External link
Filling date: 6 Sep 2025 Issue date: 9 Aug 2022

Showing 50 to 100 of 1752 patents.