Applied Materials
Utility Patents
Last updated:
List of all Applied Materials patents 1,752 in total
| Status | Patent |
|---|---|
Grant | Utility: Method of forming self-aligned via Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Apparatus and method of generating a pulsed waveform Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Ion source chamber with embedded heater Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Measurement system and grating pattern array Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Pressure regulated flow controller Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: System for tunable workpiece biasing in a plasma reactor Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Walking beam chamber Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Substrate routing and throughput modeling Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Top buffer layer for magnetic tunnel junction application Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Selective deposition of hardmask Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Plasma foreline thermal reactor system Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Ion source with biased extraction plate Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Piezo-electric end-pointing for 3D printed CMP pads Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Ceramic showerheads with conductive electrodes Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: GeH.sub.4/Ar plasma chemistry for ion implant productivity enhancement Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Wafer processing equipment having capacitive micro sensors Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Process chamber for etching low K and other dielectric films Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Chamber liner Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Method for detecting voids and an inspection system Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Plasma health determination in semiconductor substrate processing reactors Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Metrology system for substrate deformation measurement Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Chamber component part wear indicator and a system for detecting part wear Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Processing chamber Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: PLASMA TREATMENT ON METAL-OXIDE TFT Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: Method and Apparatus for Selective Deposition of Dielectric Films Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND METHODS ADAPTED TO TRANSPORT MULTIPLE SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING CHAMBER Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: Low Temperature High-Quality Dielectric Films Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: PROCESS CONTROL OF ELECTRIC FIELD GUIDED PHOTORESIST BAKING PROCESS Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: MODIFIED STACKS FOR 3D NAND Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: SUBSTRATE SUPPORT SYSTEM Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: EUV Mask Blanks And Methods Of Manufacture Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: COATING FOR CHAMBER PARTICLE REDUCTION Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: GAS INJECTION APPARATUS WITH HEATING CHANNELS Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: METHODS AND APPARATUS FOR HYBRID FEATURE METALLIZATION Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: AUTOMATIC AND ADAPTIVE FAULT DETECTION AND CLASSIFICATION LIMITS Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: HYBRID WAFER DICING APPROACH USING A SPATIALLY MULTI-FOCUSED LASER BEAM LASER SCRIBING PROCESS AND PLASMA ETCH PROCESS Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: CARBON HARD MASKS FOR PATTERNING APPLICATIONS AND METHODS RELATED THERETO Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: REMOTE CAPACITIVELY COUPLED PLASMA DEPOSITION OF AMORPHOUS SILICON Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTERNING Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: Apparatus and method of forming plasma using a pulsed waveform Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Graphene diffusion barrier Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Formation of crystalline, layered transition metal dichalcogenides Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Methods of forming metal silicide layers and metal silicide layers formed therefrom Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Low melting temperature metal purification and deposition Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: METHOD AND APPARATUS FOR MEASURING PROCESS KIT CENTERING Filling date: 6 Sep 2025 Issue date: 4 Feb 2021 |
Showing 1450 to 1500 of 1752 patents.