Amkor Technology, Inc.
SYSTEM AND METHOD FOR LASER ASSISTED BONDING OF AN ELECTRONIC DEVICE
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Abstract:
A system and method for laser assisted bonding of semiconductor die. As non-limiting examples, various aspects of this disclosure provide systems and methods that enhance or control laser irradiation of a semiconductor die, for example spatially and/or temporally, to improve bonding of the semiconductor die to a substrate.
Status:
Application
Type:
Utility
Filling date:
27 Aug 2020
Issue date:
18 Mar 2021