Amkor Technology, Inc.
Semiconductor device and manufacturing method thereof

Abstract:

A method of manufacturing a semiconductor device includes forming a substrate structure. The substrate structure includes a carrier, an adhesive layer, and a signal distribution structure (SDS). The carrier includes a top carrier side and a bottom carrier side. The adhesive layer includes a bottom adhesive layer side on the top carrier side and a top adhesive layer side. The SDS includes a bottom SDS side adhered to the top adhesive layer side and a top SDS side. The SDS also includes conductive layers and at least one dielectric layer. The method includes coupling a bottom side of a test carrier to the top SDS side. The test carrier includes an aperture that exposes at least a portion of the top SDS side. The method also includes testing the SDS, at least in part, through the aperture in the test carrier and attaching the carrier to the bottom SDS side.