ASML Holding N.V.
Utility Patents

Last updated:

List of all ASML Holding N.V. patents 666 in total

Status Patent
Grant
Utility: Method and apparatus for determining alignment properties of a beam of radiation External link
Filling date: 9 Sep 2025 Issue date: 7 Apr 2020
Grant
Utility: Method for estimating overlay External link
Filling date: 9 Sep 2025 Issue date: 7 Apr 2020
Grant
Utility: Lithographic apparatus and device manufacturing method External link
Filling date: 9 Sep 2025 Issue date: 7 Apr 2020
Grant
Utility: Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values External link
Filling date: 9 Sep 2025 Issue date: 7 Apr 2020
Grant
Utility: Determining moving properties of a target in an extreme ultraviolet light source External link
Filling date: 9 Sep 2025 Issue date: 31 Mar 2020
Grant
Utility: Method of measuring a target, and metrology apparatus External link
Filling date: 9 Sep 2025 Issue date: 31 Mar 2020
Grant
Utility: Reducing an optical power of a reflected light beam External link
Filling date: 9 Sep 2025 Issue date: 31 Mar 2020
Grant
Utility: Substrate edge detection External link
Filling date: 9 Sep 2025 Issue date: 31 Mar 2020
Grant
Utility: EUV cleaning systems and methods thereof for an extreme ultraviolet light source External link
Filling date: 9 Sep 2025 Issue date: 31 Mar 2020
Grant
Utility: Method and apparatus for image analysis External link
Filling date: 9 Sep 2025 Issue date: 31 Mar 2020
Grant
Utility: Fabricating unique chips using a charged particle multi-beamlet lithography system External link
Filling date: 9 Sep 2025 Issue date: 24 Mar 2020
Grant
Utility: Lithographic apparatus and method for loading a substrate External link
Filling date: 9 Sep 2025 Issue date: 24 Mar 2020
Grant
Utility: Lithographic apparatus and device manufacturing method External link
Filling date: 9 Sep 2025 Issue date: 24 Mar 2020
Grant
Utility: Metrology apparatus, method of measuring a structure, device manufacturing method External link
Filling date: 9 Sep 2025 Issue date: 24 Mar 2020
Grant
Utility: Metrology apparatus, lithographic system, and method of measuring a structure External link
Filling date: 9 Sep 2025 Issue date: 24 Mar 2020
Grant
Utility: Substrate holder, a lithographic apparatus and method of manufacturing devices External link
Filling date: 9 Sep 2025 Issue date: 24 Mar 2020

Showing 650 to 666 of 666 patents.