ASML Holding N.V.
Utility Patents
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Metrology parameter determination and metrology recipe selection Filling date: 9 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Target formation apparatus Filling date: 9 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Optical maskless Filling date: 9 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Methods and systems for defect inspection and review Filling date: 9 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Substrate holder for use in a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Computational metrology based correction and control Filling date: 9 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Charged particle beam inspection of ungrounded samples Filling date: 9 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Optimizing a sequence of processes for manufacturing of product units Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: High voltage vacuum feedthrough Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Inspection tool, inspection method and computer program product Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Object stage bearing for lithographic apparatus Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Detection of buried features by backscattered particles Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Device manufacturing methods Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Identification of hot spots or defects by machine learning Filling date: 9 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Method of determining a set of metrology points on a substrate, associated apparatus and computer program Filling date: 9 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Utility: SEM FOV fingerprint in stochastic EPE and placement measurements in large FOV SEM devices Filling date: 9 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Utility: Inspection method and apparatus and lithographic processing cell Filling date: 9 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Utility: Metrology method, target and substrate Filling date: 9 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Method and apparatus for illumination adjustment Filling date: 9 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Methods of inspecting samples with multiple beams of charged particles Filling date: 9 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method Filling date: 9 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Position metrology apparatus and associated optical elements Filling date: 9 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Particle beam inspection apparatus Filling date: 9 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Field programmable detector array Filling date: 9 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Methods and apparatus for monitoring a lithographic manufacturing process Filling date: 9 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Elastic guiding device, positioning device, blade and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Utilize pattern recognition to improve SEM contour measurement accuracy and stability automatically Filling date: 9 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Vibration isolation system and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Patterning process improvement involving optical aberration Filling date: 9 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Metrology system and method for determining a characteristic of one or more structures on a substrate Filling date: 9 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Lithographic patterning process and resists to use therein Filling date: 9 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Method of determining a focus of a projection system, device manufacturing method, and apparatus for determining a focus of a projection system Filling date: 9 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Defect displaying method Filling date: 9 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device Filling date: 9 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Alignment method and apparatus Filling date: 9 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Defect prediction Filling date: 9 Sep 2025 Issue date: 2 Aug 2022 |
Grant | Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 26 Jul 2022 |
Grant | Utility: Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus Filling date: 9 Sep 2025 Issue date: 19 Jul 2022 |
Grant | Utility: Method of determining a position of a feature Filling date: 9 Sep 2025 Issue date: 19 Jul 2022 |
Grant | Utility: Lithographic apparatus and an object positioning system Filling date: 9 Sep 2025 Issue date: 19 Jul 2022 |
Grant | Utility: Method and metrology apparatus for determining estimated scattered radiation intensity Filling date: 9 Sep 2025 Issue date: 19 Jul 2022 |
Grant | Utility: Metrology method, patterning device, apparatus and computer program Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Mounted hollow-core fiber arrangement Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Extraction body for lithographic apparatus Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Methods and apparatus for obtaining diagnostic information relating to an industrial process Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Particle beam apparatus Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Showing 1 to 50 of 666 patents.