Atomera Incorporated
Semiconductor device including vertically integrated optical and electronic devices and comprising a superlattice

Last updated:

Abstract:

A semiconductor device may include a substrate having waveguides thereon, and a superlattice overlying the substrate and waveguides. The superlattice may include stacked groups of layers, with each group of layers comprising a stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The semiconductor device may further include an active device layer on the superlattice including at least one active semiconductor device.

Status:
Grant
Type:

Utility

Filling date:

10 Apr 2019

Issue date:

5 Jan 2021