KLA Corporation
Localized Purge Module for Substrate Handling

Last updated:

Abstract:

A substrate-handling robot includes an end-effector to support a substrate and an arm, coupled to the end-effector, to translate the end-effector between an extended position and a retracted position. The substrate-handling robot also includes an enclosure to at least partially enclose the substrate with the substrate on the end-effector in the retracted position. The enclosure includes a shower to provide a flow of purge gas to the substrate.

Status:
Application
Type:

Utility

Filling date:

11 Sep 2020

Issue date:

16 Dec 2021