KLA
Patents, Design & Utilities
Last updated:
List of all KLA patents 72 in total
| Status | Patent |
|---|---|
Application | Utility: CONTINUOUS DEGENERATE ELLIPTICAL RETARDER FOR SENSITIVE PARTICLE DETECTION Filling date: 6 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: SCANNING SCATTEROMETRY OVERLAY MEASUREMENT Filling date: 6 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: Cantilever-Type Probe with Multiple Metallic Coatings Filling date: 6 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: LASER AND DRUM CONTROL FOR CONTINUOUS GENERATION OF BROADBAND LIGHT Filling date: 6 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: SENSOR CONFIGURATION FOR PROCESS CONDITION MEASURING DEVICES Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: ON-THE-FLY SCATTEROMETRY OVERLAY METROLOGY TARGET Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 |
Grant | Utility: Automatic recipe optimization for overlay metrology system Filling date: 6 Sep 2025 Issue date: 24 May 2022 |
Grant | Utility: Adaptive focusing system for a scanning metrology tool Filling date: 6 Sep 2025 Issue date: 17 May 2022 |
Application | Utility: STRONTIUM TETRABORATE AS OPTICAL GLASS MATERIAL Filling date: 6 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: REFLECTIVE COMPACT LENS FOR MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEM Filling date: 6 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PROCESS CONTROL SYSTEM FOR A SEMICONDUCTOR MANUFACTURING ASSEMBLY Filling date: 6 Sep 2025 Issue date: 5 May 2022 |
Grant | Utility: Method and system for manufacturing integrated circuit Filling date: 6 Sep 2025 Issue date: 3 May 2022 |
Application | Utility: PREDICTION AND METROLOGY OF STOCHASTIC PHOTORESIST THICKNESS DEFECTS Filling date: 6 Sep 2025 Issue date: 28 Apr 2022 |
Application | Utility: High Flow Vacuum Chuck Filling date: 6 Sep 2025 Issue date: 28 Apr 2022 |
Grant | Utility: Full beam metrology for x-ray scatterometry systems Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Process temperature measurement device fabrication techniques and methods of calibration and data interpolation of the same Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Overlay metrology on bonded wafers Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Design-assisted inspection for DRAM and 3D NAND devices Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 |
Application | Utility: Dynamic Control Of Machine Learning Based Measurement Recipe Optimization Filling date: 6 Sep 2025 Issue date: 14 Apr 2022 |
Grant | Utility: Delivery of light into a vacuum chamber using an optical fiber Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Application | Utility: Frequency Conversion Using Stacked Strontium Tetraborate Plates Filling date: 6 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: SYSTEM AMD METHOD FOR DETERMINING TARGET FEATURE FOCUS IN IMAGE-BASED OVERLAY METROLOGY Filling date: 6 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES Filling date: 6 Sep 2025 Issue date: 31 Mar 2022 |
Application | Utility: INTERPRETABLE DEEP LEARNING-BASED DEFECT DETECTION AND CLASSIFICATION Filling date: 6 Sep 2025 Issue date: 31 Mar 2022 |
Application | Utility: Large-Particle Monitoring with Laser Power Control for Defect Inspection Filling date: 6 Sep 2025 Issue date: 24 Mar 2022 |
Application | Utility: SYSTEM AND METHOD FOR ACCELERATING PHYSICAL SIMULATION MODELS DURING MICROELECTRONIC DEVICE FABRICATION Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: Wafer Level Spatial Signature Grouping Using Transfer Learning Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATION DEGRADATION Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: Unsupervised Learning for Repeater-Defect Detection Filling date: 6 Sep 2025 Issue date: 24 Feb 2022 |
Application | Utility: FLUORINE-DOPED OPTICAL MATERIALS FOR OPTICAL COMPONENTS Filling date: 6 Sep 2025 Issue date: 17 Feb 2022 |
Application | Utility: 3D STRUCTURE INSPECTION OR METROLOGY USING DEEP LEARNING Filling date: 6 Sep 2025 Issue date: 10 Feb 2022 |
Application | Utility: DEEP LEARNING BASED DEFECT DETECTION Filling date: 6 Sep 2025 Issue date: 10 Feb 2022 |
Application | Utility: DEEP GENERATIVE MODELS FOR OPTICAL OR OTHER MODE SELECTION Filling date: 6 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: GREY-MODE SCANNING SCATTEROMETRY OVERLAY METROLOGY Filling date: 6 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: Adaptive Focusing System for a Scanning Metrology Tool Filling date: 6 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: Inspection of Noisy Patterned Features Filling date: 6 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: INTER-STEP FEEDFORWARD PROCESS CONTROL IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 27 Jan 2022 |
Application | Utility: Wavelet System and Method for Ameliorating Misregistration and Asymmetry of Semiconductor Devices Filling date: 6 Sep 2025 Issue date: 20 Jan 2022 |
Application | Utility: Misregistration Target Having Device-Scaled Features Useful in Measuring Misregistration of Semiconductor Devices Filling date: 6 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: SYSTEMS AND METHODS FOR FEEDFORWARD PROCESS CONTROL IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: Soft X-Ray Optics With Improved Filtering Filling date: 6 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: DESIGN-TO-WAFER IMAGE CORRELATION BY COMBINING INFORMATION FROM MULTIPLE COLLECTION CHANNELS Filling date: 6 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: Localized Purge Module for Substrate Handling Filling date: 6 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: IMAGE ALIGNMENT SETUP FOR SPECIMENS WITH INTRA- AND INTER-SPECIMEN VARIATIONS USING UNSUPERVISED LEARNING AND ADAPTIVE DATABASE GENERATION METHODS Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: Non-Orthogonal Target and Method for Using the Same in Measuring Misregistration of Semiconductor Devices Filling date: 6 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: Substrate with Cut Semiconductor Pieces Having Measurement Test Structures for Semiconductor Metrology Filling date: 6 Sep 2025 Issue date: 11 Nov 2021 |
Application | Utility: METROLOGY TARGET FOR SCANNING METROLOGY Filling date: 6 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: Self-Aligning Vacuum Feed-Through for Liquid Nitrogen Filling date: 6 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: ONLINE NAVIGATIONAL DRIFT CORRECTION FOR METROLOGY MEASUREMENTS Filling date: 6 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: Soft X-Ray Optics With Improved Filtering Filling date: 6 Sep 2025 Issue date: 7 Oct 2021 |
Showing 1 to 50 of 72 patents.