KLA Corporation
Wavelet System and Method for Ameliorating Misregistration and Asymmetry of Semiconductor Devices

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Abstract:

A wavelet-analysis system and method for use in fabricating semiconductor device wafers, the system including a misregistration metrology tool operative to measure at least one measurement site on a wafer, thereby generating an output signal, and a wavelet-based analysis engine operative to generate at least one wavelet-transformed signal by applying at least one wavelet transformation to the output signal and generate a quality metric by analyzing the wavelet-transformed signal.

Status:
Application
Type:

Utility

Filling date:

4 Sep 2020

Issue date:

20 Jan 2022