KLA Corporation
INTER-STEP FEEDFORWARD PROCESS CONTROL IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES

Abstract:

A method for process control in the manufacture of semiconductor devices including performing metrology on at least one semiconductor wafer included in a given lot of semiconductor wafers, following processing of the at least one semiconductor wafer by a first processing step, generating, based on the metrology, at least one correctable to a second processing step subsequent to the processing step and adjusting, based on the correctable, performance of the second processing step on at least some semiconductor waters of the given lot of semiconductor wafers.