KLA Corporation
FLUORINE-DOPED OPTICAL MATERIALS FOR OPTICAL COMPONENTS

Abstract:

An optical component includes an optical material which is a fluorine (F)-containing optical material doped with an F-containing species different from the F-containing optical material. A coating system for depositing the optical material onto a substrate or a bulk material of an optical component is an electron beam evaporation coating system, an ion assisted deposition coating system, or an ion beam sputtering coating system.