KLA Corporation
SYSTEM AND METHOD FOR ACCELERATING PHYSICAL SIMULATION MODELS DURING MICROELECTRONIC DEVICE FABRICATION

Abstract:

A method for accelerating physical simulation models during microelectronic device fabrication may include, but is not limited to, running a physical simulation model at a first grid size having a first resolution, generating outputs at the first grid size having the first resolution from the physical simulation model, inputting the outputs at the first grid size having the first resolution from the physical simulation model into a resolution enhancement model (REM), and generating outputs at a second grid size having a second resolution via the REM to reduce at least one of a computational time cost or a computational resource cost of a controller running the physical simulation model. The physical simulation model may simulate an on-wafer performance of at least one microelectronics fabrication process. The second grid size may be smaller than the first grid size. The second resolution may be higher than the first resolution.