KLA Corporation
ON-THE-FLY SCATTEROMETRY OVERLAY METROLOGY TARGET

Last updated:

Abstract:

A metrology target is disclosed, in accordance with one or more embodiments of the present disclosure. The metrology target includes a first set of pattern elements having a first pitch, where the first set of pattern elements includes segmented pattern elements. The metrology target includes a second set of pattern elements having a second pitch, where the second set of pattern elements includes segmented pattern elements. The metrology target includes a third set of pattern elements having a third pitch, where the third set of pattern elements includes segmented pattern elements.

Status:
Application
Type:

Utility

Filling date:

11 Dec 2020

Issue date:

16 Jun 2022