KLA Corporation
ON-THE-FLY SCATTEROMETRY OVERLAY METROLOGY TARGET
Last updated:
Abstract:
A metrology target is disclosed, in accordance with one or more embodiments of the present disclosure. The metrology target includes a first set of pattern elements having a first pitch, where the first set of pattern elements includes segmented pattern elements. The metrology target includes a second set of pattern elements having a second pitch, where the second set of pattern elements includes segmented pattern elements. The metrology target includes a third set of pattern elements having a third pitch, where the third set of pattern elements includes segmented pattern elements.
Status:
Application
Type:
Utility
Filling date:
11 Dec 2020
Issue date:
16 Jun 2022