Kulicke and Soffa Industries, Inc.
WIRE BONDING MACHINES INCLUDING LINEAR MOTOR SYSTEMS

Abstract:

A wire bonding system is provided including a bond head assembly carrying a wire bonding tool. A wire bonding system also includes a linear motor system for driving the bond head assembly along a first horizontal axis. The linear motor system includes a moving magnet assembly including a magnet track and a plurality of permanent magnets coupled to the magnet track; a coil assembly arranged around the moving magnet assembly, the coil assembly including a plurality of teeth having first slots therebetween, the coil assembly also including a plurality of coils at least partially disposed in at least a portion of the slots; a position encoder system; a damper element positioned between the coil assembly and a base structure of the linear motor system; and a spring element positioned between the coil assembly and the base structure of the linear motor system.