Lam Research Corporation
Protective coating for electrostatic chucks

Abstract:

An ElectroStatic Chuck (ESC) including a chucking surface having at least a portion covered with a coating of silicon oxide (SiO.sub.2), silicon nitride (Si.sub.3N.sub.4) or a combination of both. The coating can be applied in situ a processing chamber of a substrate processing tool and periodically removed and re-applied in situ to create fresh coating.