Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 221 in total
| Status | Patent |
|---|---|
Application | Utility: HIGH DENSITY, MODULUS, AND HARDNESS AMORPHOUS CARBON FILMS AT LOW PRESSURE Filling date: 12 Sep 2025 Issue date: 8 Sep 2022 |
Application | Utility: THERMALLY CONTROLLED CHANDELIER SHOWERHEAD Filling date: 12 Sep 2025 Issue date: 8 Sep 2022 |
Application | Utility: NEAR NETSHAPE ADDITIVE MANUFACTURING USING LOW TEMPERATURE PLASMA JETS Filling date: 12 Sep 2025 Issue date: 8 Sep 2022 |
Application | Utility: EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 12 Sep 2025 Issue date: 8 Sep 2022 |
Application | Utility: PEDESTAL SETUP USING CAMERA WAFER Filling date: 12 Sep 2025 Issue date: 8 Sep 2022 |
Application | Utility: ADJUSTMENT OF POWER AND FREQUENCY BASED ON THREE OR MORE STATES Filling date: 12 Sep 2025 Issue date: 1 Sep 2022 |
Application | Utility: EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING Filling date: 12 Sep 2025 Issue date: 1 Sep 2022 |
Application | Utility: DIFFERENTIAL CONTRAST PLATING FOR ADVANCED PACKAGING APPLICATIONS Filling date: 12 Sep 2025 Issue date: 1 Sep 2022 |
Application | Utility: IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN SUBSTRATE PROCESSING SYSTEMS Filling date: 12 Sep 2025 Issue date: 1 Sep 2022 |
Application | Utility: MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 12 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT Filling date: 12 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 12 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: INTEGRATED HARDWARE-SOFTWARE COMPUTER VISION SYSTEM FOR AUTONOMOUS CONTROL AND INSPECTION OF SUBSTRATE PROCESSING SYSTEMS Filling date: 12 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: CHAMBER-ACCUMULATION EXTENSION VIA IN-SITU PASSIVATION Filling date: 12 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS Filling date: 12 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: SYSTEMS AND METHODS FOR REDUCING EFFLUENT BUILD-UP IN A PUMPING EXHAUST SYSTEM Filling date: 12 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: SPINDLE ASSEMBLY FOR WAFER TRANSFER IN A MULTI-STATION PROCESS MODULE Filling date: 12 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: Confinement Ring for Use in a Plasma Processing System Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: ATOMIC LAYER ETCH AND ION BEAM ETCH PATTERNING Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: NON-ELASTOMERIC, NON-POLYMERIC, NON-METALLIC MEMBRANE VALVES FOR SEMICONDUCTOR PROCESSING EQUIPMENT Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: INTEGRATED ADAPTIVE POSITIONING SYSTEMS AND ROUTINES FOR AUTOMATED WAFER-HANDLING ROBOT TEACH AND HEALTH CHECK Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: NUCLEATION-FREE TUNGSTEN DEPOSITION Filling date: 12 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: POWER AND DATA TRANSMISSION TO SUBSTRATE SUPPORT IN PLASMA CHAMBERS VIA OPTICAL FIBER Filling date: 12 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMICONDUCTOR PROCESSING Filling date: 12 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: SUBSTRATE STICKING AND BREAKAGE MITIGATION Filling date: 12 Sep 2025 Issue date: 14 Jul 2022 |
Application | Utility: VAPOR ACCUMULATOR FOR CORROSIVE GASES WITH PURGING Filling date: 12 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS Filling date: 12 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: GOLD THROUGH SILICON MASK PLATING Filling date: 12 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR PLASMA AND ETCHING Filling date: 12 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: DEPOSITION OF SELF ASSEMBLED MONOLAYER FOR ENABLING SELECTIVE DEPOSITION AND ETCH Filling date: 12 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: PROTECTION OF SEED LAYERS DURING ELECTRODEPOSITION OF METALS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 12 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: FORELINE ASSEMBLY FOR QUAD STATION PROCESS MODULE Filling date: 12 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: DATA CAPTURE AND TRANSFORMATION TO SUPPORT DATA ANALYSIS AND MACHINE LEARNING FOR SUBSTRATE MANUFACTURING SYSTEMS Filling date: 12 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: MODULATED ATOMIC LAYER DEPOSITION Filling date: 12 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER Filling date: 12 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY USING AN INTERVENING LAYER OR A MULTI-LAYER STACK WITH VARYING MEAN FREE PATHS FOR SECONDARY ELECTRON GENERATION Filling date: 12 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: DUAL-FREQUENCY, DIRECT-DRIVE INDUCTIVELY COUPLED PLASMA SOURCE Filling date: 12 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER Filling date: 12 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: DEPOSITION OF METAL FILMS Filling date: 12 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: BOTTOM AND MIDDLE EDGE RINGS Filling date: 12 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: BOTTOM AND MIDDLE EDGE RINGS Filling date: 12 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: Method and System for Automated Frequency Tuning of Radiofrequency (RF) Signal Generator for Multi-Level RF Power Pulsing Filling date: 12 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING Filling date: 12 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: RAPID FLUSH PURGING DURING ATOMIC LAYER DEPOSITION Filling date: 12 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR Filling date: 12 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: FRICTION STIR WELDING IN SEMICONDUCTOR MANUFACTURING APPLICATIONS Filling date: 12 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING Filling date: 12 Sep 2025 Issue date: 9 Jun 2022 |
Showing 1 to 50 of 221 patents.