Lam Research Corporation
FRICTION STIR WELDING FOR CERAMIC APPLICATIONS

Abstract:

Systems and methods for joining a substrate of metallic material to a substrate of ceramic material using friction stir welding are provided. In one example, a method includes arranging an edge of the substrate of metallic material next to an edge of the substrate of ceramic material, and advancing a spinning engagement element of a friction stir welding tool through an edge zone of the substrate of metallic material located adjacent the edge of the substrate of metallic material, thereby to form a friction stir weld between the substrate of metallic material and the substrate of ceramic material. The method may also include advancing the spinning engagement element through the edge zone of the substrate of metallic material without touching, by the engagement element, the edge of the substrate of ceramic material.