Lam Research Corporation
CERAMIC PEDESTAL WITH MULTI-LAYER HEATER FOR ENHANCED THERMAL UNIFORMITY

Abstract:

A substrate support for a substrate processing system configured to perform a deposition process on a substrate includes a pedestal having an upper surface configured to support a substrate and N heating layers vertically-stacked within the pedestal below the upper surface. Each of the N heating layers includes a respective resistive heating element. A watt density of the resistive heating element in at least one of the N heating layers varies in at least one radial zone of the substrate support relative to other radial zones of the substrate support.