Lam Research Corporation
MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING CHAMBER

Abstract:

A processing tool, comprising a processing chamber for processing a work piece, the processing chamber including at least one component part that is coated with multi-layer protective coating including (a) an aluminum layer formed on the at least one component part and (b) a ceramic coating formed on the aluminum layer. In various embodiments, the multi-layer protective coating can be applied to at least one component part prior to assembly of the processing chamber or at least partially in situ the processing chamber.