Lam Research Corporation
MEASUREMENT SYSTEM TO MEASURE A THICKNESS OF AN ADJUSTABLE EDGE RING FOR A SUBSTRATE PROCESSING SYSTEM

Abstract:

A measurement system to measure at least one of a height and a thickness of an edge ring in a plasma processing chamber includes an ultrasound transducer configured to output an ultrasound signal into the edge ring and to receive a reflected signal from the edge ring. A controller is configured to cause the ultrasound transducer to generate the ultrasound signal and to determine a thickness of the edge ring based on timing of the ultrasound signal and the reflected signal.