Lam Research Corporation
ELECTROSTATIC CHUCK SYSTEM
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Abstract:
An electrostatic chuck system is provided. A plate has gas apertures. A body formed by an additive process on a first side of the plate. The body has channels in fluid connection with the gas apertures, coolant channels, and support structure for supporting the gas channels and the coolant channels
Status:
Application
Type:
Utility
Filling date:
6 May 2020
Issue date:
9 Jun 2022