Lam Research Corporation
INTEGRATED ADAPTIVE POSITIONING SYSTEMS AND ROUTINES FOR AUTOMATED WAFER-HANDLING ROBOT TEACH AND HEALTH CHECK

Abstract:

Systems and techniques for determining and using multiple types of offsets for providing wafers to a wafer support of a wafer station of a semiconductor processing tool are disclosed; such techniques and systems may use an autocalibration wafer that may include a plurality of sensors, including a plurality of edge-located imaging sensors that may be used to image fiducials associated with two different structures located in a selected wafer station.