Lam Research Corporation
NEAR NETSHAPE ADDITIVE MANUFACTURING USING LOW TEMPERATURE PLASMA JETS
Last updated:
Abstract:
A system comprises an apparatus having a nozzle. An element is arranged around the apparatus. A feeder is configured to supply a powder of a material into the apparatus. A gas source is configured to supply a precursor gas into the apparatus and to supply an inert gas to circulate through a space between the element and the apparatus and to exit around the nozzle. A plasma generator is arranged in the apparatus and is configured to ionize the precursor gas and atomize the powder and to eject through the nozzle a jet of particles composed of the atomized powder and the ionized precursor gas onto a substrate arranged adjacent to the nozzle.
Status:
Application
Type:
Utility
Filling date:
19 Aug 2020
Issue date:
8 Sep 2022