MKS Instruments, Inc.
Impedance Matching Network Model Based Correction Scheme and Performance Repeatability

Abstract:

A matching network system for a radio frequency (RF) power delivery system includes a matching network having a variable tuning element. The matching network introduces a variable impedance between a RF power generator and a load. A stepper motor adjusts a position of the variable tuning element. The matching network system also includes a controller communicating with the matching network. The controller receives the position of the stepper motor and compares the position with a stored, predetermined position. The controller generates a positon correction and applies the position correction to the position to provide improved repeatability or reproducibility.