MKS Instruments
Patents, Design & Utilities
Last updated:
List of all MKS Instruments patents 118 in total
| Status | Patent |
|---|---|
Application | Utility: Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation Energy Filling date: 7 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: Load-Lock Gauge Filling date: 7 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: Multi-Sensor Gas Sampling Detection System for Radical Gases and Short-Lived Molecules and Method of Use Filling date: 7 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: Monitoring Radical Particle Concentration Using Mass Spectrometry Filling date: 7 Sep 2025 Issue date: 23 Jun 2022 |
Grant | Utility: Polymer composite vacuum components Filling date: 7 Sep 2025 Issue date: 21 Jun 2022 |
Grant | Utility: Method and apparatus for deposition cleaning in a pumping line Filling date: 7 Sep 2025 Issue date: 21 Jun 2022 |
Grant | Utility: Adaptive periodic waveform controller Filling date: 7 Sep 2025 Issue date: 21 Jun 2022 |
Application | Utility: Switched Capacitor Modulator Filling date: 7 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery with Pressure Control Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: Thermal Conductivity Gauge Filling date: 7 Sep 2025 Issue date: 19 May 2022 |
Application | Utility: Pressure Control Using An External Trigger Filling date: 7 Sep 2025 Issue date: 12 May 2022 |
Grant | Utility: Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications Filling date: 7 Sep 2025 Issue date: 26 Apr 2022 |
Application | Utility: Intermodulation Distortion Mitigation Using Electronic Variable Capacitor Filling date: 7 Sep 2025 Issue date: 31 Mar 2022 |
Grant | Utility: Capacitance manometer with improved baffle for improved detection accuracy Filling date: 7 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Microwave magnetron with constant anodic impedance and systems using the same Filling date: 7 Sep 2025 Issue date: 22 Feb 2022 |
Application | Utility: Endpoint Detection of Deposition Cleaning in a Pumping Line and a Processing Chamber Filling date: 7 Sep 2025 Issue date: 17 Feb 2022 |
Grant | Utility: Intermodulation distortion mitigation using electronic variable capacitor Filling date: 7 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Microwave applicator with solid-state generator power source Filling date: 7 Sep 2025 Issue date: 11 Jan 2022 |
Application | Utility: High Speed Synchronization Of Plasma Source/Bias Power Delivery Filling date: 7 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: System and Method for Arc Detection Using a Bias RF Generator Signal Filling date: 7 Sep 2025 Issue date: 2 Dec 2021 |
Grant | Utility: Methods and apparatus for pressure based mass flow ratio control Filling date: 7 Sep 2025 Issue date: 30 Nov 2021 |
Grant | Utility: High speed synchronization of plasma source/bias power delivery Filling date: 7 Sep 2025 Issue date: 26 Oct 2021 |
Application | Utility: Valve Apparatuses and Related Methods for Reactive Process Gas Isolation and Facilitating Purge During Isolation Filling date: 7 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: Adaptive Control For A Power Generator Filling date: 7 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: Capacitance Manometer Filling date: 7 Sep 2025 Issue date: 23 Sep 2021 |
Grant | Utility: Radical output monitor for a remote plasma source and method of use Filling date: 7 Sep 2025 Issue date: 7 Sep 2021 |
Application | Utility: Cooling And Compression Clamp For Short Lead Power Devices Filling date: 7 Sep 2025 Issue date: 2 Sep 2021 |
Application | Utility: Methods and Apparatus for Pressure Based Mass Flow Ratio Control Filling date: 7 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma Resistance Filling date: 7 Sep 2025 Issue date: 5 Aug 2021 |
Grant | Utility: Cooling and compression clamp for short lead power devices Filling date: 7 Sep 2025 Issue date: 27 Jul 2021 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery with Concentration Measurement Filling date: 7 Sep 2025 Issue date: 15 Jul 2021 |
Application | Utility: Thermal Conductivity Gauge Filling date: 7 Sep 2025 Issue date: 8 Jul 2021 |
Grant | Utility: Actively cooled vacuum isolation valve Filling date: 7 Sep 2025 Issue date: 6 Jul 2021 |
Grant | Utility: Adaptive control for a power generator Filling date: 7 Sep 2025 Issue date: 22 Jun 2021 |
Grant | Utility: Method and apparatus for deposition cleaning in a pumping line Filling date: 7 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Plasma source having a dielectric plasma chamber with improved plasma resistance Filling date: 7 Sep 2025 Issue date: 25 May 2021 |
Grant | Utility: Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber Filling date: 7 Sep 2025 Issue date: 18 May 2021 |
Grant | Utility: Method for ion mass separation and ion energy control in process plasmas Filling date: 7 Sep 2025 Issue date: 4 May 2021 |
Application | Utility: Intermodulation Distortion Mitigation Using Electronic Variable Capacitor Filling date: 7 Sep 2025 Issue date: 22 Apr 2021 |
Application | Utility: MICROWAVE MAGNETRON WITH CONSTANT ANODIC IMPEDANCE AND SYSTEMS USING THE SAME Filling date: 7 Sep 2025 Issue date: 8 Apr 2021 |
Grant | Utility: System for and method of fast pulse gas delivery Filling date: 7 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: Anode electrode shield for inverted magnetron cold cathode ionization gauge Filling date: 7 Sep 2025 Issue date: 6 Apr 2021 |
Application | Utility: Polymer Composite Vacuum Components Filling date: 7 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: Method and Apparatus for Deposition Cleaning in a Pumping Line Filling date: 7 Sep 2025 Issue date: 18 Mar 2021 |
Grant | Utility: Gas analyzer system with ion source Filling date: 7 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Method and apparatus for processing dielectric materials using microwave energy Filling date: 7 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Pulsed, bidirectional radio frequency source/load Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 |
Grant | Utility: Gas analysis with an inverted magnetron source Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 |
Grant | Utility: Toroidal plasma channel with varying cross-section areas along the channel Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 |
Showing 1 to 50 of 118 patents.