MKS Instruments, Inc.
Polymer Composite Vacuum Components
Last updated:
Abstract:
A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
Status:
Application
Type:
Utility
Filling date:
17 May 2019
Issue date:
5 Sep 2019