Microsoft Corporation
METHOD FOR MANUFACTURING NANOWIRES

Abstract:

A method for manufacturing a nanowire includes providing a sacrificial substrate, providing a patterned mask layer on the sacrificial substrate, providing a nanowire on the sacrificial substrate through an opening in the patterned mask layer, and removing the sacrificial substrate. Because the sacrificial substrate is used for growing the nanowire and later removed, the material of the sacrificial substrate can be chosen to be lattice matched with the material of the nanowire without regard to the electrical properties thereof. Accordingly, a high-quality nanowire can be grown and operated without the degradation in performance normally experienced when using a lattice matched substrate.