Onto Innovation Inc.
Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance

Abstract:

Grating-coupled surface plasmon resonance response of a calibration grating is used to calibrate the azimuth angle offset between a sample on the stage and the plane of incidence (POI) of the optical system of an optical metrology device. The calibration grating is configured to produce grating-coupled surface plasmon resonance in response to the optical characteristics of the optical metrology device. The calibration grating is coupled to the stage and positioned at a known azimuth angle with respect to the optical channel of the optical metrology device while the grating-coupled surface plasmon resonance response of the calibration grating is measured. The azimuth angle between an orientation of the calibration grating and the POI of the optical system is determined based on the grating-coupled surface plasmon resonance response. The determined azimuth angle may then be used to correct for an azimuth angle offset between the sample and the POI.